| Product | Material | Features |
| Wafer Polishing Plate | Al2O3 RUBALIT | • High rigidity • Good chemical durability • Surface shape / roughness control |
| Wafer Polishing Plate | SiC ROCAR | • High thermal conductivity • Low thermal expansion • High rigidity |
| Electrostatic Chucks | SiC ROCAR | • High purity • High plasma durability • High chucking / de-chucking response |
| Vacuum Chucks | SiC ROCAR | • High purity • High chemical durability • Variety of surface design |
| End Effectors / Wafer Handling | Al2O3 | • High purity • Mirror polished surface |
| End Effectors / Wafer Handling | SiC ROCAR | • High purity • Good chemical durability • High rigidity • Mirror polished surface |
| Chamber Rings / Sputtering Targets | Al2O3 / SiC / AlN RUBALIT | • High purity • High plasma durability • High transmission factor |
| Metallised Products | Al2O3 RUBALIT Stainless Steel Kovar | • IC Packages • High vacuum component • High voltage terminal |
Customized Solutions for Demanding Semiconductor Applications
Advanced Ceramic Solutions for the Semiconductor Industry
Over 100 years of experience in technical ceramics, combined with comprehensive process know-how and outstanding product characteristics make us one of the key go to solution partners, when it comes to ceramic components utilized in the semiconductor industry. Because it is characterized by harsh processing environments and require the ability to withstand tough chemical and physical conditions resulting in long lasting functional performance and reliability.
Advanced Ceramics meeting Highest Demands
Indispensable for the Semiconductor Business
Discover the advantages offered by our advanced ceramics portfolio and benefit from our solution expertise for a variety of handling and manufacturing processes in the semiconductor industry. We develop our ceramic components and parts according to your individual application requirements, so you can design and maintain your processes flexibly and reliably.
The optimal solution for your needs
Because we see ourselves not only as a pure manufacturer of high-quality industrial ceramic products, but rather as a strong development partner who transform your requirements into individual solutions: with state of the art products, in almost any desired geometry and design, with the corresponding material properties and optimum functionality. In addition, extremely resistant to harsh environmental conditions such as heat, changing temperatures, mechanical stress and aggressive chemicals.
Our goal is your success
Take advantage and rely on CeramTec‘s ceramic experts. Whether in semiconductor wafer and wafer processing, semiconductor manufacturing or handling and packaging - our components made of high-purity technical ceramics (aluminum oxide and silicon carbide) ensure long lasting performance and reliability. As a result, you benefit from higher efficiency and productivity. For sure!
Examples from the CeramTec Portfolio
