Customized Solutions for Demanding Semiconductor Applications

Advanced Ceramic Solutions for the Semiconductor Industry

Over 100 years of experience in technical ceramics, combined with comprehensive process know-how and outstanding product characteristics make us one of the key go to solution partners, when it comes to ceramic components utilized in the semiconductor industry. Because it is characterized by harsh processing environments and require the ability to withstand tough chemical and physical conditions resulting in long lasting functional performance and reliability.

Advanced Ceramics meeting Highest Demands

Indispensable for the Semiconductor Business

Discover the advantages offered by our advanced ceramics portfolio and benefit from our solution expertise for a variety of handling and manufacturing processes in the semiconductor industry. We develop our ceramic components and parts according to your individual application requirements, so you can design and maintain your processes flexibly and reliably.

Advanced Ceramic Solutions for the Semiconductor Industry
Advanced Ceramic Solutions for the Semiconductor Industry
The optimal solution for your needs

Because we see ourselves not only as a pure manufacturer of high-quality industrial ceramic products, but rather as a strong development partner who transform your requirements into individual solutions: with state of the art products, in almost any desired geometry and design, with the corresponding material properties and optimum functionality. In addition, extremely resistant to harsh environmental conditions such as heat, changing temperatures, mechanical stress and aggressive chemicals.

Our goal is your success

Take advantage and rely on CeramTec‘s ceramic experts. Whether in semiconductor wafer and wafer processing, semiconductor manufacturing or handling and packaging - our components made of high-purity technical ceramics (aluminum oxide and silicon carbide) ensure long lasting performance and reliability. As a result, you benefit from higher efficiency and productivity. For sure!

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Advanced Ceramic Solutions for the Semiconductor Industry
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Examples from the CeramTec Portfolio

Components for the Semiconductor Industry

ProductMaterialFeatures
Wafer Polishing Plate

Al2O3

RUBALIT

• High rigidity

• Good chemical durability

• Surface shape / roughness control

Wafer Polishing Plate

SiC

ROCAR

• High thermal conductivity

• Low thermal expansion

• High rigidity

Electrostatic Chucks

SiC

ROCAR

• High purity

• High plasma durability

• High chucking / de-chucking response

Vacuum Chucks

SiC

ROCAR

• High purity

• High chemical durability

• Variety of surface design

End Effectors / Wafer HandlingAl2O3

• High purity

• Mirror polished surface

End Effectors / Wafer Handling

SiC

ROCAR

• High purity

• Good chemical durability

• High rigidity

• Mirror polished surface

Chamber Rings / Sputtering Targets

Al2O3 / SiC / AlN

RUBALIT

• High purity

• High plasma durability

• High transmission factor

Metallised Products

Al2O3

RUBALIT

Stainless Steel Kovar

• IC Packages

• High vacuum component

• High voltage terminal

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